Directivity Modeling and Simulation Analysis of a Novel Structure MEMS Piezoelectric Vector Hydrophone

In this paper, a novel dual-mass MEMS piezoelectric vector hydrophone is proposed to eliminate the transverse effect and solve problem of directivity offset in traditional single-mass hydrophones. The reason for directional cantilever explained theoretically first time, angle predicted successfully. Both analytical finite element methods are employed analyze hydrophone. results show that has no deviation, basically eliminated, (maximum concave point depth) significantly improved, so more accurate positioning can be obtained.